1·The results show that the microsensor has excellent linearity, high sensitivity and relatively good stability.
结果表明：该微传感器具有良好的线性工作范围、良好的稳定性和较高的灵敏度。
2·Micro phenomena measurement to silicon resonant microsensor are resented in this paper.
主要论述硅谐振微传感器中微现象测量。
1·A type of capacitive microsensor whose null point and gain can be regulated is introduced here.
文中介绍一种可调零点和增益的电容式微型传感器。