1·The method of tail gas harness of trichlorosilane synthesis furnace were introduced and compared.
介绍了治理三氯氢硅合成炉尾气的方法，并进行了比较。
2·The invention relates to the field of polysilicon production, in particular to a method for treating secondary trichlorosilane in an improved Siemens method.
本发明多晶硅生产领域，具体涉及改良西门子法中二级三氯氢硅的处理方法。
3·The invention relates to a trichlorosilane differential pressure coupling rectification system and an operation method thereof.
本发明是三氯氢硅差压耦合精馏系统及操作方法。
1·The phenylated silica gel has been prepared by the reaction between the surface hydroxyl groups of silica gel and phenyl trichlorosilane.
本文利用苯基三氯硅烷和硅胶表面羟基反应制备了苯基化硅胶。