1·Ti-O film was prepared by microwave-electron convolute resonance (MW-ECR) magnetron filter arc deposition process.
采用微波电子回旋共振磁过滤弧设备制备钛氧薄膜。
2·The reasonable parameters of the convolute air cover and axial speed attenuation rule were found.
获得了影响回旋气幕形成各主要因素的合理参数以及轴向速度衰减规律。